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SEMI E82-0703 (technical revision)
実施すべき表面特性試験は，ここに規定される。また，これらの試験を行なうための既存のスタンダードは参照すること。
The target elements of this method are sodium
SEMI M40 — Guide for Measurement of Roughness of Planar Surfaces on Polished Wafers
Values of the image obtained using this method are reported in Ra
P01800 - SEMI P18 - ウェーハステッパーのオーバーレイ能力 Revision:SEMI P18-92 (Reapproved 1104) - Superseded SEMI E82-0703 (technical revision)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Referenced SEMI Standards (purchase separately) None.
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